发明名称 Compact device for enhancing the mixing of gaseous species
摘要 Apparatus and system for mixing gas comprising a first valve coupled to a first conduit controlling flow of a first gas, a second valve coupled to a second conduit controlling flow of a second gas, a controller controlling the valves, a base block with a first gas input coupled to the first conduit, a second gas input coupled to the second conduit and an output opening, a mixing chamber formed within the base block, wherein the mixing chamber is coupled to the first gas input and the second gas input to receive input gases, an inner block disposed within the mixing chamber, the inner block including a body with an inner volume and one or more perimeter holes formed through the body coupling the mixing chamber to the inner volume of the inner block; and a gas outlet configured to flow gas through the output opening of the base block.
申请公布号 US9327252(B2) 申请公布日期 2016.05.03
申请号 US201313834625 申请日期 2013.03.15
申请人 APPLIED MATERIALS, INC. 发明人 Lane John W.;Daran Berrin;Gunturi Ramachandra Murthy;Gregor Mariusch;Manjunath Bhaswan;Vasudeva Prashanth
分类号 B01F5/00;B01F5/06;B01F15/04;B01F3/02 主分类号 B01F5/00
代理机构 Moser Taboada 代理人 Moser Taboada ;Taboada Alan
主权项 1. A compact gas mixer, comprising: a base block including a first gas input, a second gas input, and an output opening; a mixing chamber having a mixing volume formed within the base block, wherein the mixing chamber is fluidly coupled to the first gas input and the second gas input to receive input gases; and an inner block disposed within the mixing chamber, the inner block comprising: a body having an inner volume;one or more perimeter holes formed through the body fluidly coupling the mixing volume of the mixing chamber to the inner volume of the inner block; anda gas outlet configured to flow gas through the output opening of the base block, wherein the one or more perimeter holes are formed at an inclined angle and extend from a periphery of the inner block proximate the gas outlet to the inner volume of the inner block proximate a closed end opposing the gas outlet of the inner block.
地址 Santa Clara CA US