WAFER TRAY AND ASSEMBLYING JIG AND METHOF FOR THE WAFER TRAY

摘要

The present invention relates to a wafer tray, an assembly jig for assembling a wafer tray, and an assembly method for the same, wherein the wafer tray mounts a wafer by including an upper tray and a lower tray and the lower tray and the upper tray are assembled on the bottom of the lower tray. The wafer tray includes: the lower tray including a wafer loading unit on which the wafer is mounted; and the upper tray connected to the lower tray in order for the wafer to be exposed by a wafer exposure opening, wherein a fixing bolt is connected to the upper tray from the bottom of the lower tray. The assembly jig for a wafer tray includes: a jig base including a base opening and mounting the lower tray, wherein the upper part and the lower part of the base opening are open; and an upper cover connected to the jig base and supporting the upper part of the upper tray when the upper tray is mounted on the upper part of the lower tray after the wafer is loaded on the wafer loading unit of the lower tray.