发明名称 |
PUMP, PUMP DEVICE, AND LIQUID SUPPLY SYSTEM |
摘要 |
A stay of a liquid is suppressed. A pump (100) includes: a tube (102) in which a liquid of a transfer target flows by having elasticity; a tube housing (104) which covers the outside of the tube (102), and keeps a gas in an inner space (V) between an outer surface of the tube (102) and the tube housing (104); and an electropneumatic regulator (RE) which supplies the gas to the inner space (V) and discharges the gas from the inner space (V). |
申请公布号 |
KR20160047997(A) |
申请公布日期 |
2016.05.03 |
申请号 |
KR20150146396 |
申请日期 |
2015.10.21 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
SASA TAKASHI;ISHIMARU DAISUKE;OKUBO TAKAHIRO;YUMOTO TOMOYUKI;MUTA TOMOHIKO |
分类号 |
H01L21/02;H01L21/027 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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