发明名称 PUMP, PUMP DEVICE, AND LIQUID SUPPLY SYSTEM
摘要 A stay of a liquid is suppressed. A pump (100) includes: a tube (102) in which a liquid of a transfer target flows by having elasticity; a tube housing (104) which covers the outside of the tube (102), and keeps a gas in an inner space (V) between an outer surface of the tube (102) and the tube housing (104); and an electropneumatic regulator (RE) which supplies the gas to the inner space (V) and discharges the gas from the inner space (V).
申请公布号 KR20160047997(A) 申请公布日期 2016.05.03
申请号 KR20150146396 申请日期 2015.10.21
申请人 TOKYO ELECTRON LIMITED 发明人 SASA TAKASHI;ISHIMARU DAISUKE;OKUBO TAKAHIRO;YUMOTO TOMOYUKI;MUTA TOMOHIKO
分类号 H01L21/02;H01L21/027 主分类号 H01L21/02
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