Vibrator with a beam-shaped portion above a recess in a substrate, and oscillator using same

摘要

A method for manufacturing a vibrator according to the present invention includes: forming a coating layer that covers a silicon substrate; patterning the coating layer; forming a semiconductor layer that covers the silicon substrate and the coating layer; forming a vibrating portion having a beam shape on the coating layer and a support portion that supports the vibrating portion by patterning the semiconductor layer; forming an opening that exposes the silicon substrate; forming a recess portion by removing the silicon substrate through the opening; and removing the coating layer. In the step of forming the vibrating portion and the support portion, the support portion having a first portion that is located on the silicon substrate, and a second portion that connects the first portion and the vibrating portion and is located on the coating layer is formed.

主权项

1. A vibrator comprising:
a silicon substrate having a recess portion formed from a surface thereof; and a semiconductor layer having:
a beam-shaped vibrating portion that is formed above the recess portion with a gap interposed therebetween; anda support portion that is formed on the surface and supports the vibrating portion, the support portion including:
a first portion that is fixed to the surface; anda second portion that connects the first portion and the vibrating portion and is formed above the surface with a gap interposed between the surface and the second portion, wherein the vibrating portion extends in a first direction from the second portion, and a dimension in a second direction of the second portion is greater than a dimension in the second direction of the vibrating portion, the second direction being a direction intersecting the first direction.