| 发明名称 | Perforated-structure body, manufacturing method therefor, and measurement apparatus and measurement method | ||
| 摘要 | A perforated-structure body having a plurality of apertures that penetrate from a first main surface to a second main surface of a perforated plate. Support substrates are stacked on at least one of the first main surface and the second main surface of the perforated plate so as to define a portion through which at least one of the apertures is exposed. | ||
| 申请公布号 | US9329125(B2) | 申请公布日期 | 2016.05.03 |
| 申请号 | US201514668562 | 申请日期 | 2015.03.25 |
| 申请人 | MURATA MANUFACTURING CO., LTD. | 发明人 | Kondo Takashi;Kamba Seiji;Hara Tetsuzo;Suzuki Masayuki |
| 分类号 | G01N21/00;G01N21/59;G01N21/3581;G01N21/01;G02B5/18;H01J37/20;G02B21/34;G01N21/03 | 主分类号 | G01N21/00 |
| 代理机构 | Arent Fox LLP | 代理人 | Arent Fox LLP |
| 主权项 | 1. A perforated-structure body comprising: a plate having a first main surface and a second main surface that opposes the first main surface, and a plurality of apertures that penetrate from the first main surface to the second main surface; and a support substrate that is stacked on at least one of the first main surface and the second main surface of the perforated plate, the support substrate defining a portion through which at least a first aperture of the plurality of apertures is exposed and at least a second aperture of the plurality of apertures is closed. | ||
| 地址 | Nagaokakyo-Shi, Kyoto-Fu JP | ||