Hybrid bonding and apparatus for performing the same

摘要

A method includes performing a hybrid bonding to bond a first package component to a second package component, so that a bonded pair is formed. In the bonded pair, first metal pads in the first package component are bonded to second metal pads in the second package component, and a first surface dielectric layer at a surface of the first package component is bonded to a second surface dielectric layer at a surface of the second package component. After the hybrid bonding, a thermal compressive annealing is performed on the bonded pair.

主权项

1. A method comprising:
performing a hybrid bonding in a pre-bonding station to bond a first package component to a second package component to form a bonded pair, wherein first metal pads in the first package component are bonded to second metal pads in the second package component, and a first surface dielectric layer at a surface of the first package component is bonded to a second surface dielectric layer at a surface of the second package component; wherein after the hybrid bonding, the first metal pads are bonded to the second metal pads through direct metal-to-metal bonding, and the first surface dielectric layer is bonded to the second surface dielectric layer through fusion bonding; after the hybrid bonding, transferring the bonded pair from the pre-bonding station to a thermal compressive annealing station; and in the thermal compressive annealing station, performing a thermal compressive annealing on the bonded pair.