发明名称 Laser-scribing of chemically strengthened glass
摘要 A method is disclosed for scribing a contained crack or vent in a chemically strengthened glass sheet. The glass has shallow surface regions under compressive stress, bounding a central region under tensile stress. The vent is formed by rapidly bulk-heating the glass, using radiation from a carbon monoxide laser, to a depth just below a surface compressive region and extending marginally into the tensile stress region then rapidly cooling the heated region with a water mist spray. The glass sheet can be subsequently divided along the vent by application of mechanical or thermal stress.
申请公布号 US9328011(B2) 申请公布日期 2016.05.03
申请号 US201313910030 申请日期 2013.06.04
申请人 Coherent, Inc. 发明人 Washko, Jr. John F.;Li Xinghua;Bosenberg Walter R.
分类号 C03B33/09;B23K26/142;C03B33/04;B23K26/073;B23K26/12;B23K26/14 主分类号 C03B33/09
代理机构 Morrison & Foerster LLP 代理人 Morrison & Foerster LLP
主权项 1. A method of scribing a sheet of chemically strengthened glass for subsequent separation into one or more parts, the chemically strengthened glass sheet characterized as having opposite surface zones under compressive stress, with a central zone between the surface zones being under tensile stress, the method comprising: using a beam of laser-radiation from a carbon monoxide (CO) gas laser directed onto a surface to be scribed, and while translating the laser-radiation beam with respect to a surface of the chemically strengthened glass sheet, heating the glass sheet to a depth extending below the surface zone, and extending partially into the central zone; and directing a coolant spray onto the surface at a predetermined distance behind the laser-radiation beam in the translation-direction thereof, thereby cooling the heated surface-zone and creating a contained crack following the translation-direction of the laser-radiation beam, the crack having a depth extending below the surface zone partially into the central zone; and wherein the beam of laser radiation emitted from the laser has an about Gaussian intensity distribution and wherein the beam is transmitted through a sealed enclosure containing air having a predetermined controlled humidity selected to convert the Gaussian intensity distribution to a flat-top intensity distribution, wherein the beam having a flat-top intensity distribution is directed to the surface to be scribed.
地址 Santa Clara CA US
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