MANUFACTURING METHOD OF NANOWIRE ARRAY PIEZOELECTRIC ELEMENT

摘要

Disclosed is a manufacturing method of a nanowire array piezoelectric element, which prevents energy loss while coming in contact with an electrode. The manufacturing method of a nanowire array piezoelectric element includes: a polymer substrate generating step of generating a polymer substrate having a convex part corresponding to a concave part of a nanowire array template by injecting ultraviolet curing resin on the nanowire array template having the concave part; a separation step of separating the polymer substrate from the nanowire array template; a deposition step of depositing a piezoelectric substance on the polymer substrate; and a patterning step of generating an electrode on the piezoelectric substance and patterning the electrode.