| 摘要 |
The present invention is to provide a sub-chuck table capable of appropriately detecting deviations of a plate material. A sub-chuck table (16) is installed in the vicinity of a chuck table (14), and has a rectangular maintenance face (16a) absorbing and maintaining the plate material (11) on the upper face thereof, the maintenance face includes multiple vertical grooves (48a) and multiple horizontal grooves (48b), a lattice-shaped absorption groove (48) connected to an absorption path (50) communicating with an absorption means is formed, the height is smaller than the thickness of the plate material at the outer edge of the maintenance face corresponding to two adjacent sides, contact walls (52a, 52b) coming in contact with the side (11c) of the plate material when disposing the plate material is installed, and the vertical grooves and the horizontal grooves positioned at the outer edge of the maintenance face have an end portion (48c) extending toward the contact wall from intersections of the vertical grooves and the horizontal grooves. |
