发明名称 ROTATIONALFLOW GENERATION SYSTEM, AND PIPING SYSTEM, SEMICONDUCTOR FABLICATION APPRATUS, HEAT EXCHANGER
摘要 The present invention provides a rotationalflow generation device for effectively preventing the blockage of a pipe, a piping system, a semiconductor fabrication apparatus, and a heat exchanger. In a device which generates rotationalflow in a fluid moving along the pipe, the rotationalflow generation device according to an aspect of the present invention has a shaft part, and a plurality of guide wings fixed to the shaft part.
申请公布号 KR20160046749(A) 申请公布日期 2016.04.29
申请号 KR20150163819 申请日期 2015.11.23
申请人 KIM, DO KYUN;TOYOHIKO SHINDO 发明人 KIM, DO KYUN;TOYOHIKO SHINDO
分类号 H01L21/02;H01L21/205;H01L21/324 主分类号 H01L21/02
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