发明名称 |
ROTATIONALFLOW GENERATION SYSTEM, AND PIPING SYSTEM, SEMICONDUCTOR FABLICATION APPRATUS, HEAT EXCHANGER |
摘要 |
The present invention provides a rotationalflow generation device for effectively preventing the blockage of a pipe, a piping system, a semiconductor fabrication apparatus, and a heat exchanger. In a device which generates rotationalflow in a fluid moving along the pipe, the rotationalflow generation device according to an aspect of the present invention has a shaft part, and a plurality of guide wings fixed to the shaft part. |
申请公布号 |
KR20160046749(A) |
申请公布日期 |
2016.04.29 |
申请号 |
KR20150163819 |
申请日期 |
2015.11.23 |
申请人 |
KIM, DO KYUN;TOYOHIKO SHINDO |
发明人 |
KIM, DO KYUN;TOYOHIKO SHINDO |
分类号 |
H01L21/02;H01L21/205;H01L21/324 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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