发明名称 |
ROTATIONALFLOW GENERATION SYSTEM, AND PIPING SYSTEM, SEMICONDUCTOR FABLICATION APPRATUS, HEAT EXCHANGER |
摘要 |
The present invention provides a rotationalflow generation device, a piping system having the same, a semiconductor manufacturing device having the same, and a heat exchanger having the same capable of preventing blocking inside a pipe. According to an aspect of the present invention, the rotationalflow generation device is installed in a pipe to generate a rotationalflow in a fluid which moves along the pipe. The rotationalflow generation device has a shaft portion and a plurality of guide wings fixed to the shaft portion. |
申请公布号 |
KR20160046465(A) |
申请公布日期 |
2016.04.29 |
申请号 |
KR20140142351 |
申请日期 |
2014.10.21 |
申请人 |
KIM, DO KYUN;TOYOHIKO SHINDO |
发明人 |
KIM, DO KYUN;TOYOHIKO SHINDO |
分类号 |
H01L21/02;H01L21/205 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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