发明名称 ROTATIONALFLOW GENERATION SYSTEM, AND PIPING SYSTEM, SEMICONDUCTOR FABLICATION APPRATUS, HEAT EXCHANGER
摘要 The present invention provides a rotationalflow generation device, a piping system having the same, a semiconductor manufacturing device having the same, and a heat exchanger having the same capable of preventing blocking inside a pipe. According to an aspect of the present invention, the rotationalflow generation device is installed in a pipe to generate a rotationalflow in a fluid which moves along the pipe. The rotationalflow generation device has a shaft portion and a plurality of guide wings fixed to the shaft portion.
申请公布号 KR20160046465(A) 申请公布日期 2016.04.29
申请号 KR20140142351 申请日期 2014.10.21
申请人 KIM, DO KYUN;TOYOHIKO SHINDO 发明人 KIM, DO KYUN;TOYOHIKO SHINDO
分类号 H01L21/02;H01L21/205 主分类号 H01L21/02
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