| 摘要 |
An objective of the present invention is to inspect a magnetron with high accuracy. According an embodiment of the present invention, a method for inspecting a magnetron determines the life of the magnetron based on a comparison between a current parameter which indicates a current status of the magnetron and is obtained from one or more measurement values for specifying a current status of the magnetron at a time point when a time period of a predetermined duration or longer has elapsed after generation of high frequency power by the magnetron is started, and a difference between power of a progressive wave and set power is lower than or equal to a first predetermined value, and power of a reflection wave is lower than or equal to a second predetermined value, and an initial parameter which indicates an initial status of the magnetron and corresponds to the current parameter. |
