SCRIBING METHOD AND SCRIBING APPARATUS

摘要

When forming a scribe line at the position right above and right below a sealant, a scribing apparatus of the present invention can smoothly form a crack with a sufficient depth on a substrate over the entire length of a scribe line. A scribing method of the present invention comprises the steps of: pressing each scribing wheel (301, 401) at the position opposite to a sealant on the top surface of a mother substrate (G) and at the position opposite to a sealant on the bottom surface of the mother substrate (G) so as to match the starting positions of scribe lines on both sides of the mother substrate (G) in a plan view; forming scribe lines by moving each scribing wheel (301, 401) so as to have one scribing wheel (301) to be delayed to the other scribing wheel (401); and matching the finishing positions of the scribe lines by advancing the scribing wheel (301) to the scribing wheel (401).