METHOD FOR MANUFACTURING STORAGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a storage device at lower cost.SOLUTION: A method for manufacturing a storage device, comprising: forming a block copolymer layer 20 including a first polymer and a second polymer having lower surface energy than the first polymer on a substrate 10; subjecting the block copolymer layer 20 to heat treatment and separating the block copolymer layer 20 so that a first phase 20a including the first polymer and extending in a first direction and a second phase 20b including the second polymer and extending in the first direction are alternately arranged; selectively forming a first metal wiring layer 12 extending in the first direction on a surface of the first phase 20a; forming a memory layer 16 whose resistance changes when voltage is applied on the first metal wiring layer 12; and forming a second metal wiring layer 14 extending in the second direction crossing the first direction on the memory layer 16.SELECTED DRAWING: Figure 1