ELECTROSTATIC CHUCK AND BASE MEMBER FOR USE IN THE SAME

摘要

An electrostatic chuck includes a base member and an electrostatic chuck substrate. The base member includes a cooling path. The electrostatic chuck substrate is connected to an upper surface of the base member through an adhesive layer so as to attract a substrate to be mounted. The cooling path includes an introduction portion, a discharge portion and a conduit. The cooling medium is introduced from an outside of the base member to the introduction portion. The cooling medium is discharged from the discharge portion. The conduit includes a start end portion communicating with the introduction portion and a final end portion communicating with the discharge portion. The introduction portion is inclined toward a lower surface of the base member and at a predetermined angle with respect to an axis perpendicular to the upper surface. The introduction portion extends from the lower surface toward the start end portion.

主权项

1. An electrostatic chuck comprising:
a base member that includes a cooling path through which a cooling medium flows; and an electrostatic chuck substrate that is connected to an upper surface of the base member through an adhesive layer so as to attract and retain a substrate to be mounted on an upper surface of the electrostatic chuck substrate; wherein the cooling path comprises
an introduction portion to which the cooling medium is introduced from an outside of the base member,a discharge portion from which the cooling medium is discharged to the outside of the base member, anda conduit including
a start end portion that communicates with the introduction portion, anda final end portion that communicates with the discharge portion, the introduction portion is inclined toward a lower surface of the base member and at a predetermined angle with respect to an axis perpendicular to the upper surface of the base member, and the introduction portion extends from the lower surface of the base member toward the start end portion of the conduit.