发明名称 CRUCIBLE MEASUREMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method and a measurement device which non-destructively measure a structure of a layer of a silica glass crucible in a thickness direction.SOLUTION: A measurement device which measures a structure of a layer of a silica glass crucible 1 in a thickness direction includes a light emission part 2 which emits laser light to the silica glass crucible 1 serving as a measurement object, and a scattering circumstance measurement part which measures a scattering circumstance indicating a state of scattering of a laser light coming from the light emission part 2 into the silica glass crucible 1. The scattering circumstance measurement part is configured to measure a scattering circumstance at each location in a thickness direction of the silica glass crucible 1.SELECTED DRAWING: Figure 2
申请公布号 JP2016064931(A) 申请公布日期 2016.04.28
申请号 JP20140193113 申请日期 2014.09.22
申请人 SUMCO CORP 发明人 SUDO TOSHIAKI;SATO TADAHIRO;KITAHARA KEN;TOBITA SHUJI;KITAHARA ERIKO
分类号 C03B20/00;C30B29/06;G01N21/47 主分类号 C03B20/00
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