发明名称 |
CRUCIBLE MEASUREMENT DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method and a measurement device which non-destructively measure a structure of a layer of a silica glass crucible in a thickness direction.SOLUTION: A measurement device which measures a structure of a layer of a silica glass crucible 1 in a thickness direction includes a light emission part 2 which emits laser light to the silica glass crucible 1 serving as a measurement object, and a scattering circumstance measurement part which measures a scattering circumstance indicating a state of scattering of a laser light coming from the light emission part 2 into the silica glass crucible 1. The scattering circumstance measurement part is configured to measure a scattering circumstance at each location in a thickness direction of the silica glass crucible 1.SELECTED DRAWING: Figure 2 |
申请公布号 |
JP2016064931(A) |
申请公布日期 |
2016.04.28 |
申请号 |
JP20140193113 |
申请日期 |
2014.09.22 |
申请人 |
SUMCO CORP |
发明人 |
SUDO TOSHIAKI;SATO TADAHIRO;KITAHARA KEN;TOBITA SHUJI;KITAHARA ERIKO |
分类号 |
C03B20/00;C30B29/06;G01N21/47 |
主分类号 |
C03B20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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