| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminated polishing pad which permits high-accuracy optical ending point detection and hardly peels off a window from a double-sided tape irrespective of such a structure that a back surface of a light transmission region is adhered to the double-sided tape, and to provide a manufacturing method of the laminated polishing pad.SOLUTION: A manufacturing method of a laminated polishing pad includes: a process of preparing an adhesion lamination sheet 17 by causing an unadhered lamination sheet in which a polishing layer 11 having a light transmission region 10 within an opening part A9 of a polishing region 8 and a double-sided tape 16 having a hot-melt adhesive layer 13 on one surface of a base material 12 and having a pressure-sensitive adhesive layer 14 and a releasing sheet 15 on the other surface are laminated on each other to pass through a pair of rollers of which the roller on the side of the double-sided tape is a hot roller, and adhering and fixing the polishing region and the light transmission region onto a hot-melt adhesive layer of the double-sided tape; and a process of peeling the release sheet from the adhesion lamination sheet and attaching a support layer 18 having the opening part B19 on a part corresponding to the light transmission region, onto the exposed pressure-sensitive adhesive layer. Therein, the release sheet has a surface in contact with the pressure-sensitive adhesive layer, of which the arithmetic average roughness Ra is 1 μm or less.SELECTED DRAWING: Figure 2 |
