| 摘要 |
PROBLEM TO BE SOLVED: To provide lithography simulation using a differential model.SOLUTION: The differential model describes differences in imaging characteristics of two scanners related to tunable and non-tunable settings. A model for one of the two scanners is derived by using the model of the other scanner and the differential model. Similarly, a sensitivity model describes the differences in the imaging characteristics of one scanner related to different scanner settings. Additionally, the differential model and the sensitivity model are calibrated by comparison with printing results.SELECTED DRAWING: Figure 8 |
