| 摘要 |
PROBLEM TO BE SOLVED: To provide an appearance inspection system excellent in both inspection based on bright field illumination and dark field illumination, extendability, and a functionality (diversity), and to attain greatly size down and cost down of a whole system.SOLUTION: In a luminaire M1, provided are: a light source unit 3 that has a first light source block B1 arranged at a center and a second light source block B2 arranged around the first light source block B1; an optical processing unit system Uc whose optical axis is consistent with the first light source block B1, and that converts light Co of the light source unit 3 to light Cps having an isotropic irradiation angle, and irradiates the light to an inspection object surface Sd; and an illumination controller Mc that performs lighting control of the light source unit 3. Also, in an imaging device D1, provided is a pupil Dir that transmits light Cps from the first light source block B1, and does not transmit light Cps from the second light source block B2.SELECTED DRAWING: Figure 1 |
