| 摘要 |
A compound spring MEMS resonator includes a resonator body constructed using one or more spring unit cells forming a compound spring block (55,95) and one or more compound spring blocks (54a) forming the resonator body. Each compound spring block is anchored (56, 58) at nodal points to ensure a high quality factor. The resonator body further includes masses (60a, 60b, 94a, 94b) attached to the open ends of the compound spring block and capacitively coupled to drive/sense electrodes (66, 68). The dimensions of the spring unit cells, the number of spring unit cells for a compound spring block, the size and weight of the masses, and the length and width of the support beams are selected to realize a desired resonant frequency. Multiple resonator units may be connected in parallel to form the resonator body (90). Meanwhile, the number of compound spring blocks is selected to tune the desired electrical characteristics, such as impedance, of the MEMS resonator. Release holes (94) may be used to adjust the weight of the resonator body. |
