发明名称 |
Method and Device for Generating an Electrical Discharge |
摘要 |
A device and method for generating an electrical discharge are described. A first electrode (30) is operated to be a cathode relative to a second electrode (16). A gas is introduced into the chamber (14) by the first electrode (30). The first electrode (30) has a closed antechamber (32) with a metal wall (34). A tube (36) consisting of a different material than the wall (34) is provided through which the gas from the antechamber (32) is conducted into the chamber (14). A front portion of the tube (36) is embedded in the wall (34) of the antechamber (32). In its rear portion, the tube (36) has a free end projecting into the antechamber (32). A stable electrical discharge can be generated thereby in a particularly easy manner. |
申请公布号 |
US2016118231(A1) |
申请公布日期 |
2016.04.28 |
申请号 |
US201514923303 |
申请日期 |
2015.10.26 |
申请人 |
CemeCon AG |
发明人 |
May Walter |
分类号 |
H01J37/34;C23F4/04;C23C14/35 |
主分类号 |
H01J37/34 |
代理机构 |
|
代理人 |
|
主权项 |
1. A device for generating an electrical discharge comprising:
at least a first and a second electrode in a chamber, wherein an electrical power supply is provided in order to operate the first electrode as a cathode and the second electrode as an anode, wherein the first electrode has a closed antechamber with a metal wall and a gas supply into the antechamber, and wherein a tube consisting of a material different from the material of the wall of the antechamber is provided in order to conduct gas from the antechamber into the chamber, wherein a front portion of the tube facing the chamber is embedded in the wall of the antechamber, and wherein a rear portion of the tube has an end freely projecting into the antechamber into which gas from the antechamber can enter. |
地址 |
Wurselen DE |