发明名称 Method and Device for Generating an Electrical Discharge
摘要 A device and method for generating an electrical discharge are described. A first electrode (30) is operated to be a cathode relative to a second electrode (16). A gas is introduced into the chamber (14) by the first electrode (30). The first electrode (30) has a closed antechamber (32) with a metal wall (34). A tube (36) consisting of a different material than the wall (34) is provided through which the gas from the antechamber (32) is conducted into the chamber (14). A front portion of the tube (36) is embedded in the wall (34) of the antechamber (32). In its rear portion, the tube (36) has a free end projecting into the antechamber (32). A stable electrical discharge can be generated thereby in a particularly easy manner.
申请公布号 US2016118231(A1) 申请公布日期 2016.04.28
申请号 US201514923303 申请日期 2015.10.26
申请人 CemeCon AG 发明人 May Walter
分类号 H01J37/34;C23F4/04;C23C14/35 主分类号 H01J37/34
代理机构 代理人
主权项 1. A device for generating an electrical discharge comprising: at least a first and a second electrode in a chamber, wherein an electrical power supply is provided in order to operate the first electrode as a cathode and the second electrode as an anode, wherein the first electrode has a closed antechamber with a metal wall and a gas supply into the antechamber, and wherein a tube consisting of a material different from the material of the wall of the antechamber is provided in order to conduct gas from the antechamber into the chamber, wherein a front portion of the tube facing the chamber is embedded in the wall of the antechamber, and wherein a rear portion of the tube has an end freely projecting into the antechamber into which gas from the antechamber can enter.
地址 Wurselen DE