发明名称 |
STRUCTURED SUBSTRATE FOR OPTICAL FIBER ALIGNMENT |
摘要 |
A structured substrate for optical fiber alignment is produced at least in part by forming a substrate with a plurality of buried conductive features and a plurality of top level conductive features. At least one of the plurality of top level conductive features defines a bond pad. A groove is then patterned in the substrate utilizing a portion of the plurality of top level conductive features as an etch mask and one of the plurality of buried conductive features as an etch stop. At least a portion of an optical fiber is placed into the groove. |
申请公布号 |
US2016116691(A1) |
申请公布日期 |
2016.04.28 |
申请号 |
US201514981880 |
申请日期 |
2015.12.28 |
申请人 |
International Business Machines Corporation |
发明人 |
Budd Russell A.;Fortier Paul F. |
分类号 |
G02B6/42;G02B6/32;H04B10/25 |
主分类号 |
G02B6/42 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
Armonk NY US |