发明名称 METHOD FOR MANUFACTURING NANOHOLES AND FILTER MANUFACTURED BY THE SAME
摘要 A method for manufacturing nanoholes and a filter manufactured by the same are provided, the method being capable of easily manufacturing nanoholes with a size of several to hundreds of nanometers, the method including: a preparing step of preparing a body having a through-hole which passes through two facing surfaces and has a nano- or micro-scale diameter; and a particle injecting step of injecting particles with a smaller diameter than the through-hole into the through-hole to form nanoholes with a smaller scale than the through-hole.
申请公布号 SG10201500789X(A) 申请公布日期 2016.04.28
申请号 SGX10201500789 申请日期 2015.02.02
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 YOON, JAESUNG;YOO, YEONG-EUN;KIM, JEONG HWAN;CHOI, DOO-SUN
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