Physical Quantity Detecting Vibration Element, Physical Quantity Sensor, Electronic Apparatus, and Moving Object

摘要

A vibration element includes a detection signal electrode provided in a detection vibrating arm, a detection signal terminal which is provided in a support portion and electrically connected to the detection signal electrode, and a detection ground terminal provided in the support portion, and the detection ground terminal is disposed between a first connection portion which is a connection portion with a beam portion of the support portion and a second connection portion which is a connection portion with a beam portion, and is provided to extend to the outside of the first connection portion, and the detection signal terminal is provided between the detection ground terminal and an end portion of the support portion.

主权项

1. A physical quantity detecting vibration element comprising:
a vibration body having a detection vibration portion; a support portion which supports the vibration body and includes a first end portion and a second end portion; a beam portion which connects the vibration body and a portion between the first end portion and the second end portion of the support portion; a detection signal electrode provided in the detection vibration portion; a detection signal terminal which is provided on a principal surface on one side of the support portion and electrically connected to the detection signal electrode; and a constant potential terminal which is provided on the principal surface on one side of the support portion and electrically connected to a constant potential, wherein a portion of the constant potential terminal is disposed so as to be positioned further toward the first end portion side than a connection portion with the beam portion of the support portion, and the detection signal terminal is disposed further toward the first end portion side than the constant potential terminal of the support portion.