发明名称 |
ETCHING LIQUID FOR SEMICONDUCTOR SUBSTRATE |
摘要 |
The present invention pertains to an alkaline etching fluid for treating the surface of a semiconductor substrate for a solar cell, wherein the etching fluid contains at least one hydroxystyrene polymer shown by general formula (1), and an alkali agent. The present invention demonstrates the effect of exceptional productivity and the capability to form a texture on the semiconductor substrate for a solar cell at comparatively low temperatures and in a shorter amount of time. |
申请公布号 |
WO2016063881(A1) |
申请公布日期 |
2016.04.28 |
申请号 |
WO2015JP79598 |
申请日期 |
2015.10.20 |
申请人 |
SETTSU OIL MILL., INC. |
发明人 |
AKAGI, SEIMEI;KAMADA, YOSHITERU;OHYAGI, NOBORU;SAIDA, TOSHINORI;MORIWAKI, KAZUHIRO;YAMAMOTO, YUZO |
分类号 |
H01L21/308;H01L31/0236 |
主分类号 |
H01L21/308 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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