| 摘要 |
PROBLEM TO BE SOLVED: To provide an abrasive pad capable of optically detecting an endpoint with high precision even when having a structure in which a rear surface of a window is bonded to an adhesive member.SOLUTION: The abrasive pad is formed by laminating a polishing layer having a polishing region and a light transmission region, and a support layer having an opening part through an adhesive member so that the light transmission region and the opening part overlap. Arithmetic average roughness Ra of a rear surface of the adhesive member at the opening part is less than or equal to 1 μm.SELECTED DRAWING: Figure 2 |
