发明名称 |
METHOD OF MANUFACTURING MEMBER WITH CONCAVO-CONVEX PATTERN |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a member having a concavo-convex pattern whose variations (standard deviation) in undulation pitch and undulation depth are small.SOLUTION: A method of manufacturing a member with a concavo-convex pattern includes steps of: preparing a shrinkable base material; laminating a hard layer on top of the base material; and shrinking the base material. The shrinking step involves; shrinking the base material at least in a first direction in a base material plane, then shrinking the base material in a second direction that is different from the first direction, and then shrinking the base material in a third direction that is different from the first and second directions.SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016065981(A) |
申请公布日期 |
2016.04.28 |
申请号 |
JP20140194795 |
申请日期 |
2014.09.25 |
申请人 |
JX NIPPON OIL & ENERGY CORP |
发明人 |
OZASA NAOTO;TORIYAMA SHIGETAKA;TAKAHASHI MADOKA |
分类号 |
G02B5/02;G02B5/18;H01L51/50;H05B33/02;H05B33/10 |
主分类号 |
G02B5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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