发明名称 METHOD OF MANUFACTURING MEMBER WITH CONCAVO-CONVEX PATTERN
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a member having a concavo-convex pattern whose variations (standard deviation) in undulation pitch and undulation depth are small.SOLUTION: A method of manufacturing a member with a concavo-convex pattern includes steps of: preparing a shrinkable base material; laminating a hard layer on top of the base material; and shrinking the base material. The shrinking step involves; shrinking the base material at least in a first direction in a base material plane, then shrinking the base material in a second direction that is different from the first direction, and then shrinking the base material in a third direction that is different from the first and second directions.SELECTED DRAWING: Figure 1
申请公布号 JP2016065981(A) 申请公布日期 2016.04.28
申请号 JP20140194795 申请日期 2014.09.25
申请人 JX NIPPON OIL & ENERGY CORP 发明人 OZASA NAOTO;TORIYAMA SHIGETAKA;TAKAHASHI MADOKA
分类号 G02B5/02;G02B5/18;H01L51/50;H05B33/02;H05B33/10 主分类号 G02B5/02
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