MANUFACTURING METHOD OF PATTERN FORMATION SUBSTRATE, PRACTICE SUBSTRATE, AND SUBSTRATE ASSEMBLY

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a pattern formation substrate capable of improving a yield of the pattern formation substrate.SOLUTION: A step structure 23 of a practice substrate 20 having a substrate body 21 and the step structure 23, projecting from the substrate body 21, provided on a surface with a pattern area 22 is made larger than a step structure 13 of a substrate 10 to be imprinted in plan view. After a practice imprint step using the practice substrate 20, a production imprint step to the substrate 10 to be imprinted is executed.SELECTED DRAWING: Figure 2