EXFOLIATION METHOD, LIGHT-EMITTING DEVICE, MODULE AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To improve yield in an exfoliation step and to provide a light-emitting device or the like which improves adhesion of layers and is unlikely to be destroyed.SOLUTION: An exfoliation method includes the steps of: forming an exfoliation layer on a first substrate; forming an exfoliated layer on the exfoliation layer; overlapping an adhesive layer on the exfoliation layer and the exfoliated layer; curing the adhesive layer; forming a starting point of exfoliation by removing a part of the exfoliated layer that is overlapped with the exfoliation layer and the adhesion layer; and separating the first substrate and the exfoliated layer. A force separating the first substrate and the exfoliated layer is equal to or more than a force required for separating the first substrate and the exfoliated layer. The force required for separating the first substrate and the exfoliated layer is smaller than a force required for generating interface destruction between the exfoliated layer and the adhesive layer that is cured in the third step.SELECTED DRAWING: Figure 1