| 摘要 |
PROBLEM TO BE SOLVED: To provide a production method of a molybdenum alloy target having a large area, a uniform composition and a uniform fine structure.SOLUTION: In a production method of a molybdenum alloy target including a step for subjecting a compacted preliminary molding block surface-treated beforehand to hot isostatic press at the temperature of 500-1,080°C, a target comprises a binder between at least two compacted blocks each containing molybdenum as much as about 30 wt% or more and at least one additional alloy component, which is a binder not containing a fine structure by an additional binder, and not containing a visible joint line having a larger width than about 300 μm.SELECTED DRAWING: Figure 4 |
