| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic compound removal device that reduces oxidation of a sample without requiring an ozone filter.SOLUTION: An organic compound removal device 1 is so configured that, when pressure of a vacuum chamber 2 exhausted by a vacuum pump 6 is reduced and a value of a pressure signal received from a vacuum gauge 7 of a control part 9 becomes smaller than a first threshold, the control part 9 turns a power supply 8 to ON to light a xenon excimer lamp 5 and directly irradiate a sample 3 with vacuum ultraviolet ray Uto decompose and remove an organic compound adhered to the sample.SELECTED DRAWING: Figure 1 |
