High-Sensitivity Terahertz Micro-Fluidic Channel Sensor and Preparation Method Thereof

摘要

A high-sensitivity terahertz micro-fluidic channel sensor and a preparation method thereof. The sensor includes a substrate and a cover layer, respectively provided with a metal plane reflector and a metal microstructure layer; a micro-fluidic channel is formed between the metal plane reflector and the metal microstructure layer; and when the micro-fluidic channel tests liquid, a composite structure formed of the metal microstructure layer, the test liquid and the metal plane reflector shows good absorption properties. The method includes forming a metal plane reflector and a metal microstructure layer on a substrate and a cover layer, respectively; fixedly connecting the substrate to the cover layer, and forming a closed micro-fluidic channel between the substrate and the cover layer; and forming a through via, communicated to the micro-fluidic channel, on the substrate and/or the cover layer, to form a flow channel for transferring liquid to be tested to or from the sensor.

主权项

1. A high-sensitivity terahertz micro-fluidic channel sensor, comprising a substrate having a metal plane reflector thereon and at least one cover layer having a metal microstructure layer thereon; at least one micro-fluidic channel, for allowing liquid to be tested to flow through, is formed between the metal plane reflector and the metal microstructure layer; and when the micro-fluidic channel has the liquid to be tested therein, a composite structure mainly formed of the metal microstructure layer, the liquid to be tested and the metal plane reflector shows, in the terahertz band, good absorption properties due to resonance.