| 摘要 |
PROBLEM TO BE SOLVED: To accurately perform the sectional shape measurement of a high tilt work using a detachable rotary stage.SOLUTION: A shape measurement device includes: a detachable fixture for holding a work. The fixture includes: a fixing part (39); a rotary movable part (53) capable of rotating and standing still while holding a work to the fixing part. The rotary movable part includes: a work holding part; and two reference spheres (51, 52) whose radii are known. The two reference spheres are located at a position partially overlapped with a scanning line of one direction. The centers of the two spheres are arranged in a deviated manner by the predetermined distance equal to or less than an equator radius along a rotation center axis of the rotary movable part with respect to the scanning line of one direction.SELECTED DRAWING: Figure 2 |
