| 摘要 |
Methods are presented for facilitating fabrication of nanowire structures, such as one or more nanowire field effect transistors. The methods include, for instance: providing a substrate; providing first material layers and second material layers above the substrate, the first material layers interleaved with the second material layers; removing portions of the first material layers and second material layers, the removing forming a plurality of nanowire stacks, including first material nanowires and second material nanowires; removing the first material nanowires from at least one nanowire stack; and removing the second material nanowires from at least one other nanowire stack, where the at least one nanowire stack and at least one other nanowire stack include a p-type nanowire stack(s) and a n-type nanowire stack(s), respectively. |
