| 摘要 |
PROBLEM TO BE SOLVED: To provide a cylindrical sputtering target that is hardly breakable in use and facilitated in cooling a target material from the inside thereof, and to provide a sputtering target set.SOLUTION: A sputtering target 1 includes: a target material 2 providing a cylindrical shape and comprising a ceramic sintered body; and a backing tube 3 for holding the target material 2. The target material 2 has a through-hole 2a bored in an axial direction of the cylindrical shape. The backing tube 3 is inserted into the through-hole 2a. A formation material of the backing tube 3 has a melting point higher than that of the ceramic sintered body. The target material 2 and the backing tube 3 are directly connected to each other.SELECTED DRAWING: Figure 1 |
