MAGNETO-IMPEDANCE SENSOR ELEMENT WITH ELECTROMAGNETIC COIL AND MAGNETO-IMPEDANCE SENSOR WITH ELECTROMAGNETIC COIL

摘要

A technique is provided which reduces the coil pitch and increases the number of coil turns in an MI element and allows for high sensitivity and miniaturization. The MI element is configured such that a magnetic wire and a coil wound around the magnetic wire are disposed on an electrode wiring substrate. When manufacturing the coil, a three-layer structure of the coil and thin film coil strips formed by a vapor deposition process are focused on thereby to allow the coil pitch to be 14 micrometers or less. The three-layer structure comprises coil lower portions of a recessed shape, coil upper portions of a protruding shape, and through-hole portions that connect the coil lower portions with the coil upper portions.

主权项

1. A magneto-impedance sensor element with electromagnetic coil, comprising:
an electrode wiring substrate; a magnetic wire that is a magnetic sensitive body and provided above the electrode wiring substrate; a coil that is wound around the magnetic wire; and four terminals that are formed on the electrode wiring substrate to connect end portions of the magnetic wire and the coil with an external integrated circuit, wherein the coil has a three-layer structure comprising: coil lower portions of a recessed shape; coil upper portions of a protruding shape; and joint portions that joint the coil lower portions and the coil upper portions via a level difference therebetween (or a two-layer structure in a special case where the level difference is zero), wherein the coil is electrically isolated from the magnetic wire by an insulating material having an adhesive function while the wire is fixed to the substrate.