| 摘要 |
Published is a selective doping system for a solar cell by using atmospheric plasma. The selective doping system includes a power supply part which generates a power voltage and a ground voltage and supplies them, a solar cell wafer which is formed in a low concentration doping region, a tray which transfers the solar cell wafer, and a plasma source part which receives a gas from the outside, distributes uniformly the same and stores the same, discharges the gas according to a predetermined gas emission pattern by applying a power voltage, thereby generating an atmospheric plasma jet due to corona discharge and selectively doping the solar cell water with high concentration. So, production speed can be improved. |
