| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibrator, an oscillator, an electronic apparatus and a movable body that are capable of reducing thermoelastic loss and mitigating reduction of the Q value.SOLUTION: A vibrator 1 includes: a substrate 2; and a substrate electrode 3 and a vibrating part electrode 4 that are arranged on the substrate 2. The vibrating part electrode 4 includes: a base part 42 opposed to the substrate 2; and vibrating parts 44, 45, 46, 47 connected to the base part 42 and opposed to the substrate electrode 3. In the plan view of the substrate 2, the width of the vibrating parts 44-47 is shorter at the distal end than at the proximal end by the length in the range from 1 μm to 4 μm inclusive.SELECTED DRAWING: Figure 2 |
