METHOD AND DEVICE TO OBTAIN THE NATURAL FREQUENCY OF VIBRATION AND ELASTIC MULTILAYER MODULE WITH NANOMETRIC THICKNESS.

摘要

The present disclosure is related to a methodology and a device for obtaining natural frequency of vibration of one or more layers with micro or nano-metric dimensions in rectangular geometry of the cantilever. The free end of the beam is excited by an air pulse controlled with a solenoid valve to produce oscillation. An optoelectronic sensor-emitter system captures the amplitudes of oscillation in time and converts them into voltage signals to further determine the natural frequency using the Fast Fourier Transform. These frequency changes produced by the effect of the deposited layers are related to predetermined mathematical models to determine the elastic module and the characteristics of the oscillation in the beams of one or several layers. Alternatively, by using a piezoelectric driver to replace the air pulse, the device is used to perform frequency sweeps, thus determining the resonant frequency of the beam.