| 摘要 |
The invention provides a pressure actuated valve which can inhibit the vibration of a film. The pressure actuated valve (1) is formed by laminating multiple thin film metal parts (51). Each of the multiple thin film metal parts (51) has a ring-shaped plate part (53) and a V-shaped protruding part (54) connected with the inner rim of the plate part (53). A valve opening (16) is opened and closed in correspondence with movement of a center part (C) of the protruding part (54) of the thin film metal part (51) closest to the valve opening (16). During the valve closed period when the valve opening (16) is closed, preset deformation is performed to form a following shape that the center part (C) of the protruding part (54) of the thin film metal part (51A) closest to the valve opening (16) is configured to exceed a position, corresponding to the center part (C), of a turnover motion start position (P1) towards a turnover motion direction side, while the reset part, apart from the center part (C), of the protruding part (54) is configured to be in front of a position corresponding to the part, apart from the center part (C), of the turnover motion start position (P1). |
