发明名称 粘着テープ及びウエーハの加工方法
摘要 The present invention provides a method for machining an adhesion belt and a wafer using the adhesion belt, wherein the adhesion belt can inhibit static electricity, and is used for supporting the wafer, and the wafer forms a plurality of devices in a manner of being divided by a predetermined separation line on the surface of the wafer, and the wafer is characterized by comprising an adhesion layer laminated on the surface of the thin sheet shaped substrate, and an anti-electrification layer laminated at the back side of the thin sheet shaped substrate.
申请公布号 JP5912283(B2) 申请公布日期 2016.04.27
申请号 JP20110093862 申请日期 2011.04.20
申请人 株式会社ディスコ 发明人 湯平 泰吉
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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