发明名称 液滴吐出装置及び給除材方法
摘要 <P>PROBLEM TO BE SOLVED: To solve a problem that it is hard to improve drawing quality to a work piece by a conventional material removing method. <P>SOLUTION: A liquid droplet discharging device includes: a table plate 71 having a mounting face 25a used for mounting a work piece W; a discharge head for discharging liquid body toward the work piece W mounted on the table plate 71; and a lifting device for mounting the work piece W on the mounting face 25a by lowering the work piece W and separating the work piece W from the mounting face 25a by raising the work piece W mounted on the mounting face 25a. When mounting the work piece W on the mounting face 25a, the lifting device lowers the work piece W in a state that the work piece W is bent in a direction being convex toward the mounting face 25a, and when separating the work piece W from the mounting face 25a, the work piece W is raised in a state that the bending of the work piece W is relaxed than when the work piece W is mounted on the mounting face 25a. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5909882(B2) 申请公布日期 2016.04.27
申请号 JP20110123482 申请日期 2011.06.01
申请人 セイコーエプソン株式会社 发明人 篠原 亨
分类号 H01L21/677;B05C13/00;B65G49/06 主分类号 H01L21/677
代理机构 代理人
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