| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a continuous diffusion processing apparatus that can enhance both the production efficiency and the processing quality. <P>SOLUTION: A continuous diffusion processing apparatus has a feeding table 50 on which plural plate-like processing targets are mounted, a barrel-type heating furnace extending linearly, a feeding device 2 for successively feeding the feeding table 50 into the heating furnace 1 and feeding out the fed-in feeding table 50 from the heating furnace 1, a heating device 3 for heating the processing targets mounted on the feeding table 50 passing through the heating furnace 1, plural partition members 7 for sectioning the area between the feed-in portion 11 and the feed-out portion 12 in the heating furnace 1 into plural zones in the feeding direction, and a gas supply and discharge device 4 for individually supplying gas to each zone and individually discharging gas from each zone. <P>COPYRIGHT: (C)2012,JPO&INPIT |
