发明名称 立体形状のセラミックスヒーター
摘要 A three-dimensional ceramic heater, such as a cylindrical ceramic heater, is proposed in which the conductive ceramic heating element is multi-furcated into lanes at least in the folded-back sections so that the electric current tends to flow in a more uniform and hence laminar manner with the effect that the localized over heating is suppressed greatly.
申请公布号 JP5911179(B2) 申请公布日期 2016.04.27
申请号 JP20130170963 申请日期 2013.08.21
申请人 信越化学工業株式会社 发明人 串橋 卓馬;木村 昇;田村 和義
分类号 H05B3/10;C23C14/24;H01L21/203;H05B3/12;H05B3/14;H05B3/20 主分类号 H05B3/10
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