发明名称 脂環式モノマー、これを含むポリマー、およびこのポリマーを含むフォトレジスト組成物
摘要 A monomer has the Formula I: wherein R1, R2, and R3 are each independently a C1-30 monovalent organic group, and R1, R2, and R3 are each independently unsubstituted or include a halogen, nitrile, ether, ester, ketone, alcohol, or a combination comprising at least one of the foregoing functional groups; R4 includes H, F, C1-4 alkyl, or C1-4 fluoroalkyl; A is a single bond or a divalent linker group, wherein A is unsubstituted or substituted to include a halogen, nitrile, ether, ester, ketone, alcohol, or a combination comprising at least one of the foregoing functional groups; m and n are each independently an integer of 1 to 8; and x is 0 to 2n+2, and y is 0 to 2m+2.
申请公布号 JP5913076(B2) 申请公布日期 2016.04.27
申请号 JP20120273454 申请日期 2012.12.14
申请人 ローム アンド ハース エレクトロニック マテリアルズ エルエルシーRohm and Haas Electronic Materials LLC 发明人 コン・リュー;ミンキ・リー;チェン−バイ・スー
分类号 C08F220/18;G03F7/039 主分类号 C08F220/18
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