薄膜形成装置,申请号JP20120177536-传众专利搜索

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发明名称	薄膜形成装置
摘要
申请公布号	JP5912987(B2)	申请公布日期	2016.04.27
申请号	JP20120177536	申请日期	2012.08.09
申请人	麒麟麦酒株式会社	发明人	清水真里;天野勉;中谷正樹
分类号	C23C16/455	主分类号	C23C16/455
代理机构		代理人
主权项
地址

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