| 摘要 |
The present invention relates to a nozzle jet system and a method for forming a pattern of a substrate of a nozzle jet system, capable of performing rapidity and accuracy of a substrate pattern forming process. According to an embodiment of the present invention, the nozzle jet system includes: a handling robot handling a substrate; a processing chamber including a first processing area and a second processing area, wherein a pattern forming process on the substrate inserted by the handling robot is performed, and a mounting frame in which the first processing area and the second processing area are arranged; and a main stage installed in the processing chamber to move to a mounting frame and moving the loaded substrate to the first processing area and the second processing area. The first and second processing areas individually includes: a nozzle jet head module mounted on the mounting frame to move and having a pattern on the substrate loaded on the main stage; an inkjet head module mounted on the mounting frame to move and processing an abnormal part among parts pattern-processed by a nozzle jet head; and a cleaning module cleaning the nozzle jet head module or the inkjet head module. When the substrate is tested by the nozzle jet head module or the inkjet head module in one among the first and second processing areas, a cleaning process can be performed on the nozzle jet head module or the inkjet head module by the cleaning module in the other one. |
