| 摘要 |
A measuring head for a nano-indentation instrument, said nano-indentation instrument comprising a positioning system arranged to position a sample relative to the measuring head, the measuring head comprising:
- a measuring subsystem (2) attached to a frame (1) adapted to be connected to the nano-indentation instrument, the measuring subsystem (2) comprising a first actuator (20) and an indenter (26) adapted to indent a surface of said sample under application of a force applied by the first actuator (20) on the indenter, the measuring subsystem (2) further comprising a force sensing system adapted to detect said force applied by the first actuator (20);
- a reference subsystem (3) attached to said frame, the reference subsystem (3) comprising a second actuator (30), a reference structure (33) in operative connection with the second actuator (30), and a separation detector adapted to determine a predetermined separation of the reference structure (33) and said surface of said sample. According to the invention:
- the measuring head comprises a relative position sensing system adapted to determine a relative position of the indenter (26) and the reference structure;
- the measuring head further comprises means for determining a depth of penetration of the indenter (26) in a surface of the sample based at least partially on an output of the relative position determining sensor; and
- the separation detector comprises a topographic tip (36) protruding from the reference structure (3) and arranged to contact said surface of said sample. |
