| 摘要 |
PROBLEM TO BE SOLVED: To provide a nano-imprint method by which can fill resin in accordance with the shape of a fine uneven pattern formed on a mold without requiring high pressing force or obstructing the filling of resin.SOLUTION: In a nano-imprint method for filling resin into a fine uneven pattern formed on a mold, a capillary force of resin efficiently acts on a mold when the relationship between surface free energy of the mold and that of the resin, the magnitude of surface free energy of the resin, the relationship between adhesion energy of the mold with the resin, surface free energy of the resin and its polar component, and such satisfy specific conditions. |
