发明名称 離型装置
摘要 PROBLEM TO BE SOLVED: To release a mold while preventing the expansion and contraction, and deformation of a material to be transferred and surely forming a transfer pattern.SOLUTION: A mold release device 1, which is a device for releasing an imprint mold 30 from a material to be transferred 20 against which the imprint mold 30 is pressed, includes: a peeling guide plate 10 that is wider than the material to be transferred 20 and stuck to the rear surface 23 on the opposite side of a transfer pattern forming side surface 22 of the material to be transferred 20; and driving means 40 that moves both ends 11 of the peeling guide plate 10 in a direction of releasing the material to be transferred 20 from the imprint mold 30. The driving means 40 comprises a cylinder driving device 42, a pulley part 43, and a wire 41 whose tips are mounted to both ends 11 of the peeling guide plate 10 through jigs 12.
申请公布号 JP5913244(B2) 申请公布日期 2016.04.27
申请号 JP20130196964 申请日期 2013.09.24
申请人 株式会社フジクラ 发明人 秦 恵一郎;築地 保彦
分类号 B29C59/02;H01L21/027 主分类号 B29C59/02
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